Range of Standard Systems
| System | Magnetrons: | Chamber: | Drum | Coating |
|---|---|---|---|---|
| Type | Size x No. of | Diameter x Height | Diameter | Area (m2) |
| 350/4 | 250 x 4 | 350 x 350 | 200 | 0.1 |
| 450/4 | 330 x 4 | 450 x 450 | 250 | 0.2 |
| 550/4 | 380 x 4 | 550 x 650 | 350 | 0.3 |
| 650/4 | 450 x 4 | 650 x 650 | 400 | 0.4 |
| 850/4 | 750 x 4 | 700 x 850 | 500 | 1.0 |
| 850/6 | 750 x 6 | 850 x 850 | 500 | 1.0 |
| 1100/4 | 900 x 4 | 700 x 1100 | 700 | 1.5 |
| 1100/6 | 900 x 6 | 850 x 1100 | 700 | 1.5 |
Standard Features
- Full, automated computer control
- Advanced Energy power supplies for magnetrons
- Turbo pumping system
- Optical Plasma Emission Monitor for indirect stoichiometry control
- Patented closed field unbalanced magnetron sputter ion plating technology
- Specially designed Plasmag™ sputter sources
- Large front opening door
- Wide range of coatings can be deposited
- Quartz crystal monitoring
- Double wall, water-cooled, vertical-axis stainless-steel chamber
- High speed and stable drum for substrate loading
- All systems CE marked
- Two sets of removable shields simplify cleaning
Options
- Polycold water vapour cryopump
- Drum flip or three-axis substrate holder
- Optical monitor
- Automatic datalogging of deposition parameters
- All system functionality through flat screen touchpanel
- Status displayed on mimic diagrams
- Dynamic graphical user interface
- Orderly and safe shutdown procedures
- Existing processes easily modified
- New processes can be readily implemented
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